JPH0572011B2 - - Google Patents

Info

Publication number
JPH0572011B2
JPH0572011B2 JP60221138A JP22113885A JPH0572011B2 JP H0572011 B2 JPH0572011 B2 JP H0572011B2 JP 60221138 A JP60221138 A JP 60221138A JP 22113885 A JP22113885 A JP 22113885A JP H0572011 B2 JPH0572011 B2 JP H0572011B2
Authority
JP
Japan
Prior art keywords
section
cleaning
handler
disk
disk member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60221138A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6282513A (ja
Inventor
Kazuhiko Kenmori
Nobuo Morita
Takashi Hibya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP22113885A priority Critical patent/JPS6282513A/ja
Publication of JPS6282513A publication Critical patent/JPS6282513A/ja
Publication of JPH0572011B2 publication Critical patent/JPH0572011B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP22113885A 1985-10-05 1985-10-05 デイスク部材の洗浄装置 Granted JPS6282513A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22113885A JPS6282513A (ja) 1985-10-05 1985-10-05 デイスク部材の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22113885A JPS6282513A (ja) 1985-10-05 1985-10-05 デイスク部材の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6282513A JPS6282513A (ja) 1987-04-16
JPH0572011B2 true JPH0572011B2 (en]) 1993-10-08

Family

ID=16762053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22113885A Granted JPS6282513A (ja) 1985-10-05 1985-10-05 デイスク部材の洗浄装置

Country Status (1)

Country Link
JP (1) JPS6282513A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02251288A (ja) * 1989-03-22 1990-10-09 Toshiba Corp 洗浄装置
JPH0723559B2 (ja) * 1989-06-12 1995-03-15 ダイセル化学工業株式会社 スタンパー洗浄装置
JPH1011749A (ja) * 1996-06-27 1998-01-16 Speedfam Co Ltd ディスクの洗浄及び乾燥装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127234A (ja) * 1982-12-30 1984-07-23 Fujitsu Ltd 円板自動処理装置
JPS6093119A (ja) * 1983-10-28 1985-05-24 Mazda Motor Corp エンジンの吸気装置

Also Published As

Publication number Publication date
JPS6282513A (ja) 1987-04-16

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